The Matlabfigures contain the reconstructed surface topographies obtained with CSI (Fig. 5). 
The mat files contain the corresponding image stacks. The scanning step size is 20 nm. 
The csv file containes the reconstructed topography obtained by the confocal microscope (Fig. 6). The corresponding image stack is not available from the commercial system.
The AFM measurement result can be found in the .txt file (Fig. 4).
The figures refer to the corresponding article linked to this dataset (https://doi.org/10.1088/2515-7647/addbb2).