This dataset contains the raw measurement data underlying the associated publication. All measurements were acquired using a Linnik interferometer equipped with 0.95 NA objectives and a royal blue LED as the illumination source. Image acquisition was performed during an axial scan of the measurement object, with a fixed step size of 20 nm between successive frames. To improve measurement reliability at high surface slopes, an optical MEMS array functioning as a ring shutter was introduced into the illumination pathway. The effectiveness of this approach is validated through measurements of steel spheres with a nominal diameter of approximately 6 µm.
The dataset is organized into two folders:

steel_spheres — Contains HDF5 (.h5) measurement files with the raw interferometric data from the steel sphere measurements. These data correspond to the results presented in Figure 6 of the publication.

mirror_flat_rb — Contains measurements of a flat mirror acquired under the different ring shutter configurations described and illustrated in Figure 4 of the publication.

In order to read the data i.e. in python they need to be reshaped to the correct order. The dataset name in the h5-file is 'Images'.
Below an example for a python code is given:

    import h5py
    
    Images=h5py.File('filename','r')
    data=Images.get('Images')[()]
    data = data.reshape(len(data[0,0,:]),len(data[0,:,0]), len(data[:,0,0]))
    data= data[:,:,:]