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Lehmann, Peter

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Lehmann

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Peter

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Research Data

Now showing 1 - 4 of 4
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    Research Data
    Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]
    (Universität Kassel) Künne, Marco; Lehmann, Peter; Pahl, Tobias; Stelter, Andre
    This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 450 nm and the step size between every z-step is 20 nm. Information about the different apertures used for the measurements are described in detail in the corresponding publication. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.
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    Three-Dimensional Transfer Functions of Interference Microscopes [Dataset]
    Lehmann, Peter; Hagemeier, Sebastian; Pahl, Tobias
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    Low-cost high-speed fiber-coupled interferometer for precise surface profilometry [Dataset]
    (Universität Kassel) Hagemeier, Sebastian; Zou, Yijian; Pahl, Tobias; Rosenthal, Felix; Lehmann, Peter
    This dataset contains raw data obtained by a fiber-coupled laser interferometer for surface profilometry (NA = 0.38, wavelength = 1550 nm) and a dataset measured by an atomic force microscope for reference. The data obtained by the laser interferometer includes surface profiles measured from a chirp standard manufactured by the PTB (Physikalisch-Technische Bundesanstalt, Germany), a sinusoidal standard 531 from Simetrics GmbH, and height values obtained from the identical position of an aluminum mirror. These results are shown in section 3 of the article mentioned below. The data are saved in an HFD5 file format and can be used by example codes programmed using the software Python and Matlab. Furthermore, the interference signal shown in Figure 3 is in a CSV file format in the dataset. In addition, a profile obtained from the fine chirp texture of the chirp standard measured by an atomic force microscope (Nanite, Nanosurf AG) with EBD-HAR probe IP from Nanotools GmbH in non-contact mode is contained in the dataset. These data are saved in a CSV file format and can be used by example a code programmed using the software Python. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.
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    Research Data
    Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry [Dataset]
    (Universität Kassel) Künne, Marco; Pahl, Tobias; Ribotta, Luigi; Giura, Andrea; Zucco, Massimo; Murataj, Irdi; Ferrarese Lupi, Federico; Lehmann, Peter
    This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 440 nm and the step size between every z-step is 20 nm. The measured sample contains several V-groove structures etched into silicon. The structure shown in the corresponding publication is the central V-groove structure.