Three-Dimensional Transfer Functions of Interference Microscopes [Dataset]
Lehmann, Peter Prof. Dr.-Ing. habil.
Hagemeier, Sebastian Dr.-Ing.
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This dataset contains raw data obtained by a Mirau coherence scanning interferometer (50x, NA = 0.55, red LED with a central wavelength of 630 nm) and resulting 3D surface topographies. The raw data includes the depth response signals obtained from a diamond milled aluminum mirror. These data are evaluated using envelope as well as phase signal processing algorithms (the so-called LT-algorithm) with an evaluation wavelength of 670 nm, leading to the results presented in Figure 15 of the corresponding article mentioned below. Both the raw data as well as the results are saved in an HDF5 file format and can be used as shown by example codes programmed using the software Python and MATLAB. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.The 20IND07 TracOptic project has received funding from the EMPIR programme co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation programme.
Related ResourcesIsSupplementTo: (DOI) https://doi.org/10.3390/metrology1020009
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