Absolute measuring interferometric high-speed profilometer [Dataset]
Description
This dataset contains experimental measurement data obtained for the investigation of high-speed profilometer measurements and absolute surface topography measurement. The dataset comprises measurements acquired with different experimental configurations, including a depth scan with a velocity of 10 µm/s, a lateral scan of a chirp normal, and a measurement of the chirp normal using the GD25 measurement system. The high-speed measurements were recorded with sampling frequencies of 5 MHz and 10 MHz and excitation frequencies of 20 kHz and 19.5 kHz, respectively. The data are provided in HDF5 and text-based formats and include the raw measurement signals as well as example Python scripts for reading and processing the data. The dataset is intended to support the analysis and further development of high-speed profilometry methods, as well as the reproducibility and further investigation of the results presented in the corresponding publication. IMPORTANT: If you use these data, please cite the corresponding article mentioned below.
License
Except where otherwised noted, this item's license is described as Attribution 4.0 International