Research Data

Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]

Description

This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 450 nm and the step size between every z-step is 20 nm. Information about the different apertures used for the measurements are described in detail in the corresponding publication. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.

Metadata

Authors
Relations
Supplement to: https://doi.org/10.1088/1361-6501/ad727d
DOI
https://doi.org/10.48662/daks-46
Faculty
FB16:Elektrotechnik/Informatik
Department
Messtechnik
Language
en
Data types
Dataset
Keywords
InterferometryCoherence scanning interferometyNA effect
DFG-subjects
407-02 Messsysteme
Funding
Funding Organisations:
Project Information:LE 992/16-1
License
http://creativecommons.org/licenses/by/3.0/de/
URI
https://daks.uni-kassel.de/handle/123456789/202
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Files
Document
Type
Size
RawDatasets.zip
2.29 GB
Readme.txt
Text
922 B
Künne, Marco; Lehmann, Peter; Pahl, Tobias; Stelter, Andre. Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]. DaKS. https://doi.org/10.48662/daks-46

License

Attribution 3.0 Germany
Except where otherwised noted, this item's license is described as Attribution 3.0 Germany