Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]

Künne, Marco; Lehmann, Peter; Pahl, Tobias; Stelter, Andre

doi:https://doi.org/10.48662/daks-46

Research Data

Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]

Description

This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 450 nm and the step size between every z-step is 20 nm. Information about the different apertures used for the measurements are described in detail in the corresponding publication. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.

Metadata

Authors

Dates

Available since: 2024-08-08

Relations

Supplement to: https://doi.org/10.1088/1361-6501/ad727d

DOI

https://doi.org/10.48662/daks-46

Faculty

FB16:Elektrotechnik/Informatik

Department

Messtechnik

Language

en

Data types

Dataset

Keywords

InterferometryCoherence scanning interferometyNA effect

DFG-subjects

407-02 Messsysteme

Funding

Funding Organisations:

DFG – Deutsche Forschungsgemeinschaft

Project Information:LE 992/16-1

License

http://creativecommons.org/licenses/by/3.0/de/

URI

https://daks.uni-kassel.de/handle/123456789/202

Files

Document

Type

Size

RawDatasets.zip

2.29 GB

Readme.txt

Text

922 B

Künne, Marco; Lehmann, Peter; Pahl, Tobias; Stelter, Andre. (2024). Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]. DaKS. https://doi.org/10.48662/daks-46

License

Except where otherwised noted, this item's license is described as Attribution 3.0 Germany